@misc{indiciae620570085a53, title = {Novel fabrication tools for dynamic compression targets with engineered voids using photolithography methods}, author = {Pandolfi, Silvia and Carver, Thomas and Hodge, Daniel and Leong, Andrew F. T. and Kurzer-Ogul, Kelin and Hart, Philip and Galtier, Eric and Khaghani, Dimitri and Cunningham, Eric and Nagler, Bob and Lee, Hae Ja and Bolme, Cynthia Anne and Ramos, Kyle James and Li, Kenan and Liu, Yanwei and Sakdinawat, Anne and Marchesini, Stefano and Kozlowski, Pawel Marek and Curry, Chandra B. and Decker, Franz-Joseph and Vetter, Sharon and Shang, Jessica and Aluie, Hussein and Dayton, Matthew and Montgomery, David S. and Sandberg, Richard L. and Gleason, Arianna E.}, year = {2022}, doi = {10.1063/5.0107542}, url = {https://www.osti.gov/biblio/1891060}, note = {Source identifier: 1891060} }