@misc{indiciae7e544ed77bac,
  title = {High-throughput Bend Strengths of Polysilicon MEMS Components.},
  author = {DELRIO, FRANK and Boyce, Brad and Friedman, Lawrence and Cook, Robert},
  year = {2021},
  doi = {10.2172/1891969},
  url = {https://www.osti.gov/biblio/1891969},
  note = {Source identifier: 1891969}
}