TY  - RPRT
TI  - High-throughput Bend Strengths of Polysilicon MEMS Components.
AU  - DELRIO, FRANK
AU  - Boyce, Brad
AU  - Friedman, Lawrence
AU  - Cook, Robert
PY  - 2021
DO  - 10.2172/1891969
UR  - https://www.osti.gov/biblio/1891969
ID  - 1891969
ER  -