@misc{indiciae9560f144fa0d,
  title = {Molecular layer etching},
  author = {Young, Matthias John and Letourneau, Stephen Payonk and Choudhury, Devika and Elam, Jeffrey W. and Yanguas-Gil, Angel and Mane, Anil U.},
  year = {2022},
  url = {https://www.osti.gov/biblio/1892646},
  note = {Source identifier: 1892646}
}