@misc{indiciae82f1fb6d662a,
  title = {ALD reactor for coating porous substrates},
  author = {Mane, Anil U. and Libera, Joseph and Elam, Jeffrey W.},
  year = {2022},
  url = {https://www.osti.gov/biblio/1892917},
  note = {Source identifier: 1892917}
}