@misc{indiciae07afa207a722, title = {Accuracy limitations for composition analysis by XPS using relative peak intensities: LiF as an example}, author = {Brundle, Christopher R. and Crist, B V. and Bagus, Paul S.}, year = {2020}, doi = {10.1116/6.0000674}, url = {https://www.osti.gov/biblio/1896503}, note = {Source identifier: 1896503} }