@misc{indiciaebcdd04e7ef4b, title = {Scalable synthesis of supported catalysts using fluidized bed atomic layer deposition}, author = {Lu, Zheng and Yanguas-Gil, Angel and Kang, Donghyeon and Darapaneni, Pragathi and Mane, Anil U. and Marshall, Christopher L. and Elam, Jeffrey W.}, year = {2022}, doi = {10.1116/6.0001891}, url = {https://www.osti.gov/biblio/1902316}, note = {Source identifier: 1902316} }