@misc{indiciae65226289bc2a,
  title = {Silicon Tetrafluoride Vapor Pressure Study},
  author = {Hanson, D. E. and Santos, C. M.},
  year = {2022},
  doi = {10.2172/1908063},
  url = {https://www.osti.gov/biblio/1908063},
  note = {Source identifier: 1908063}
}