@misc{indiciaecf15aef5e323, title = {Non-destructive depth-resolved characterization of residual strain fields in high electron mobility transistors using differential aperture x-ray microscopy}, author = {Pagan, Darren C. and Rasel, Md J. and Lim, Rachel E. and Sheyfer, Dina and Liu, Wenjun and Haque, Aman}, year = {2022}, doi = {10.1063/5.0109606}, url = {https://www.osti.gov/biblio/1909351}, note = {Source identifier: 1909351} }