TY  - RPRT
TI  - Non-destructive depth-resolved characterization of residual strain fields in high electron mobility transistors using differential aperture x-ray microscopy
AU  - Pagan, Darren C.
AU  - Rasel, Md J.
AU  - Lim, Rachel E.
AU  - Sheyfer, Dina
AU  - Liu, Wenjun
AU  - Haque, Aman
PY  - 2022
DO  - 10.1063/5.0109606
UR  - https://www.osti.gov/biblio/1909351
ID  - 1909351
ER  -