@misc{indiciae456c37fa7928,
  title = {Single-beam plasma source deposition of carbon thin films},
  author = {Kim, Young and Baule, Nina and Shrestha, Maheshwar and Zheng, Bocong and Schuelke, Thomas and Fan, Qi Hua},
  year = {2022},
  doi = {10.1063/5.0102605},
  url = {https://www.osti.gov/biblio/1924512},
  note = {Source identifier: 1924512}
}