@misc{indiciaed518342eccc1,
  title = {Formation of antireflective surfaces},
  author = {Black, Charles T. and Rahman, Atikur and Eisaman, Matthew and Ashraf, Ahsan},
  year = {2022},
  url = {https://www.osti.gov/biblio/1924907},
  note = {Source identifier: 1924907}
}