@misc{indiciae2699d474dd56,
  title = {Photolithography of atomic layer resist},
  author = {Katzenmeyer, Aaron Michael and Misra, Shashank and Baczewski, Andrew David and Anderson, Evan Michael and Wang, George T. and Ward, Daniel Robert},
  year = {2022},
  url = {https://www.osti.gov/biblio/1925019},
  note = {Source identifier: 1925019}
}