@misc{indiciae93de9e217da4, title = {Beam-steering system based on a MEMS-actuated vertical-coupler array}, author = {Zhang, Xiaosheng and Wu, Ming-Chiang A. and Michaels, Andrew S. and Henriksson, Johannes}, year = {2022}, url = {https://www.osti.gov/biblio/1925098}, note = {Source identifier: 1925098} }