@misc{indiciaee8f8019c5f34,
  title = {Selectively patterned Mg-doped GaN by SiN x -driven hydrogen injection},
  author = {Lee, Hyun-Soo and Rahman, Mohammad Wahidur and Verma, Darpan and Poole, Violet M. and Myers, Roberto C. and McCluskey, Matthew D. and Rajan, Siddharth},
  year = {2022},
  doi = {10.1116/6.0002029},
  url = {https://www.osti.gov/biblio/1958026},
  note = {Source identifier: 1958026}
}