TY  - RPRT
TI  - Selectively patterned Mg-doped GaN by SiN x -driven hydrogen injection
AU  - Lee, Hyun-Soo
AU  - Rahman, Mohammad Wahidur
AU  - Verma, Darpan
AU  - Poole, Violet M.
AU  - Myers, Roberto C.
AU  - McCluskey, Matthew D.
AU  - Rajan, Siddharth
PY  - 2022
DO  - 10.1116/6.0002029
UR  - https://www.osti.gov/biblio/1958026
ID  - 1958026
ER  -