@misc{indiciae216e82d35ee9,
  title = {Using machine learning with optical profilometry for GaN wafer screening},
  author = {Gallagher, James C. and Mastro, Michael A. and Ebrish, Mona A. and Jacobs, Alan G. and Gunning, Brendan P. and Kaplar, Robert J. and Hobart, Karl D. and Anderson, Travis J.},
  year = {2023},
  doi = {10.1038/s41598-023-29107-9},
  url = {https://www.osti.gov/biblio/1958889},
  note = {Source identifier: 1958889}
}