TY  - RPRT
TI  - Using machine learning with optical profilometry for GaN wafer screening
AU  - Gallagher, James C.
AU  - Mastro, Michael A.
AU  - Ebrish, Mona A.
AU  - Jacobs, Alan G.
AU  - Gunning, Brendan P.
AU  - Kaplar, Robert J.
AU  - Hobart, Karl D.
AU  - Anderson, Travis J.
PY  - 2023
DO  - 10.1038/s41598-023-29107-9
UR  - https://www.osti.gov/biblio/1958889
ID  - 1958889
ER  -