@misc{indiciae2f183ceefc47,
  title = {Synthetic Metal Atomic Layer Deposition Tool (Final Report)},
  author = {Zotter, Beth and Otto, Lauren},
  year = {2023},
  doi = {10.2172/1962103},
  url = {https://www.osti.gov/biblio/1962103},
  note = {Source identifier: 1962103}
}