@misc{indiciaec76d3b14adb0,
  title = {BLAZED REFLECTION GRATINGS PATTERNED VIA ELECTRON-BEAM LITHOGRAPHY FOR X-RAY SOURCES},
  author = {Bruccoleri, Alexander and MacArthur, Jonathan and Ng, May Ling and Lee, Lance},
  year = {2022},
  url = {https://www.osti.gov/biblio/1963494},
  note = {Source identifier: 1963494}
}