TY  - RPRT
TI  - BLAZED REFLECTION GRATINGS PATTERNED VIA ELECTRON-BEAM LITHOGRAPHY FOR X-RAY SOURCES
AU  - Bruccoleri, Alexander
AU  - MacArthur, Jonathan
AU  - Ng, May Ling
AU  - Lee, Lance
PY  - 2022
UR  - https://www.osti.gov/biblio/1963494
ID  - 1963494
ER  -