@misc{indiciae13a73b31944c,
  title = {2022 Defects in Semiconductors GRC/GRS},
  author = {Fu, Kai-Mei},
  year = {2022},
  doi = {10.2172/1969514},
  url = {https://www.osti.gov/biblio/1969514},
  note = {Source identifier: 1969514}
}