@misc{indiciaea409c1a9ca7f,
  title = {Defect-mediated diffusion of implanted Mg in GaN: Suppressing dopant redistribution by sequential thermal and microwave annealing},
  author = {Meyers, V. and Rocco, E. and McEwen, B. and Shevelev, M. and Sklyar, V. and Shahedipour-Sandvik, F.},
  year = {2023},
  doi = {10.1063/5.0143429},
  url = {https://www.osti.gov/biblio/1970667},
  note = {Source identifier: 1970667}
}