TY  - RPRT
TI  - Defect-mediated diffusion of implanted Mg in GaN: Suppressing dopant redistribution by sequential thermal and microwave annealing
AU  - Meyers, V.
AU  - Rocco, E.
AU  - McEwen, B.
AU  - Shevelev, M.
AU  - Sklyar, V.
AU  - Shahedipour-Sandvik, F.
PY  - 2023
DO  - 10.1063/5.0143429
UR  - https://www.osti.gov/biblio/1970667
ID  - 1970667
ER  -