TY  - RPRT
TI  - Process window estimation in manufacturing through Entropy-Sigma active learning
AU  - Karandikar, Jaydeep
AU  - Chaudhuri, Anirban
AU  - Smith, Scott
AU  - Schmitz, Tony
AU  - Willcox, Karen
PY  - 2022
DO  - 10.1016/j.mfglet.2022.09.001
UR  - https://www.osti.gov/biblio/1975376
ID  - 1975376
ER  -