@misc{indiciaef319432c4ef4,
  title = {Erosion of focus rings in capacitively coupled plasma etching reactors},
  author = {Wang, Xifeng and Lee, Hyunjae and Nam, Sang Ki and Kushner, Mark J.},
  year = {2021},
  doi = {10.1116/6.0001225},
  url = {https://www.osti.gov/biblio/1980702},
  note = {Source identifier: 1980702}
}