TY  - RPRT
TI  - Erosion of focus rings in capacitively coupled plasma etching reactors
AU  - Wang, Xifeng
AU  - Lee, Hyunjae
AU  - Nam, Sang Ki
AU  - Kushner, Mark J.
PY  - 2021
DO  - 10.1116/6.0001225
UR  - https://www.osti.gov/biblio/1980702
ID  - 1980702
ER  -