@misc{indiciae9208e8e61fe5,
  title = {Pulsed laser induced atomic layer etching of silicon},
  author = {Eliceiri, Matthew and Rho, Yoonsoo and Li, Runxuan and Grigoropoulos, Costas P.},
  year = {2023},
  doi = {10.1116/6.0002399},
  url = {https://www.osti.gov/biblio/1983726},
  note = {Source identifier: 1983726}
}