TY  - RPRT
TI  - Pulsed laser induced atomic layer etching of silicon
AU  - Eliceiri, Matthew
AU  - Rho, Yoonsoo
AU  - Li, Runxuan
AU  - Grigoropoulos, Costas P.
PY  - 2023
DO  - 10.1116/6.0002399
UR  - https://www.osti.gov/biblio/1983726
ID  - 1983726
ER  -