@misc{indiciaee20213f75aad,
  title = {Simple coplanar waveguide resonator mask targeting metal-substrate interface},
  author = {Kopas, Cameron J. and Lachman, Ella and McRae, Corey H. and Mohan, Yuvraj and Mutus, Josh Y. and Nersisyan, Ani and Poudel, Amrit},
  year = {2022},
  url = {https://www.osti.gov/biblio/1983793},
  note = {Source identifier: 1983793}
}