@misc{indiciae039160140534,
  title = {Resolving the Heat Generated from ZrO 2 Atomic Layer Deposition Surface Reactions},
  author = {Bielinski, Ashley R. and Kamphaus, Ethan P. and Cheng, Lei and Martinson, Alex B. F.},
  year = {2023},
  doi = {10.1002/anie.202301843},
  url = {https://www.osti.gov/biblio/1985193},
  note = {Source identifier: 1985193}
}