TY  - RPRT
TI  - Resolving the Heat Generated from ZrO 2 Atomic Layer Deposition Surface Reactions
AU  - Bielinski, Ashley R.
AU  - Kamphaus, Ethan P.
AU  - Cheng, Lei
AU  - Martinson, Alex B. F.
PY  - 2023
DO  - 10.1002/anie.202301843
UR  - https://www.osti.gov/biblio/1985193
ID  - 1985193
ER  -