TY  - RPRT
TI  - Miniaturized vacuum package and methods of making same
AU  - McGuinness, Hayden James Evans
AU  - Gehl, Michael
AU  - DeRose, Christopher Todd
AU  - Parazzoli, Lambert Paul
AU  - Haltli, Raymond A.
PY  - 2023
UR  - https://www.osti.gov/biblio/1987030
ID  - 1987030
ER  -