@misc{indiciae9caf53a2660e,
  title = {Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics},
  author = {Munechika, Keiko and Chao, Weilun and Dhuey, Scott and Lacey, Ian and Pina-Hernandez, Carlos and Rochester, Simon and Yashchuk, Valeriy V},
  year = {2022},
  doi = {10.1117/12.2633163},
  url = {https://www.osti.gov/biblio/1994326},
  note = {Source identifier: 1994326}
}