TY  - RPRT
TI  - Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics
AU  - Munechika, Keiko
AU  - Chao, Weilun
AU  - Dhuey, Scott
AU  - Lacey, Ian
AU  - Pina-Hernandez, Carlos
AU  - Rochester, Simon
AU  - Yashchuk, Valeriy V
PY  - 2022
DO  - 10.1117/12.2633163
UR  - https://www.osti.gov/biblio/1994326
ID  - 1994326
ER  -