@misc{indiciae1c6dd3176baf, title = {Fabrication of Atomic-scale Defect Structures within 2D Materials through Automated Electron Beam Control}, author = {Boebinger, Matthew and Roccapriore, Kevin and Ghosh, Ayana and Xiao, Kai and Lupini, Andrew and Ziatdinov, Maxim and Kalinin, Sergei V. and Unocic, Raymond}, year = {2023}, doi = {10.1093/micmic/ozad067.710}, url = {https://www.osti.gov/biblio/1996695}, note = {Source identifier: 1996695} }