TY  - RPRT
TI  - Fabrication of Atomic-scale Defect Structures within 2D Materials through Automated Electron Beam Control
AU  - Boebinger, Matthew
AU  - Roccapriore, Kevin
AU  - Ghosh, Ayana
AU  - Xiao, Kai
AU  - Lupini, Andrew
AU  - Ziatdinov, Maxim
AU  - Kalinin, Sergei V.
AU  - Unocic, Raymond
PY  - 2023
DO  - 10.1093/micmic/ozad067.710
UR  - https://www.osti.gov/biblio/1996695
ID  - 1996695
ER  -