@misc{indiciaeec7021100bda,
  title = {Plasma-based method for delayering of circuits},
  author = {Shul, Randy J. and Friedman, Caitlin Rochford and Salazar, Gregory Paul and Rye, Michael J. and Sniegowski, Jeffry Joseph and Greth, Karl Douglas},
  year = {2023},
  url = {https://www.osti.gov/biblio/1998425},
  note = {Source identifier: 1998425}
}