@misc{indiciae6a2cbeae75fc,
  title = {Heterogeneous integration of an electro-optical platform},
  author = {Kodigala, Ashok and Lentine, Anthony L. and Boynton, Nicholas and Trotter, Douglas Chandler and Friedmann, Thomas A. and Weiner, Philip Harrison},
  year = {2023},
  url = {https://www.osti.gov/biblio/1998483},
  note = {Source identifier: 1998483}
}