TY  - RPRT
TI  - Heterogeneous integration of an electro-optical platform
AU  - Kodigala, Ashok
AU  - Lentine, Anthony L.
AU  - Boynton, Nicholas
AU  - Trotter, Douglas Chandler
AU  - Friedmann, Thomas A.
AU  - Weiner, Philip Harrison
PY  - 2023
UR  - https://www.osti.gov/biblio/1998483
ID  - 1998483
ER  -