@misc{indiciae3a2d6cdd4579,
  title = {Near-surface damage and mixing in Si-Cl 2 -Ar atomic layer etching processes: Insights from molecular dynamics simulations},
  author = {Vella, Joseph R. and Graves, David B.},
  year = {2023},
  doi = {10.1116/6.0002719},
  url = {https://www.osti.gov/biblio/1999799},
  note = {Source identifier: 1999799}
}