@misc{indiciae8598581ff93f,
  title = {Local stress measurements in microelectronic devices using HREBSD.},
  author = {Ruggles, Timothy},
  year = {2022},
  doi = {10.1017/s1431927622002896},
  url = {https://www.osti.gov/biblio/2001785},
  note = {Source identifier: 2001785}
}