@misc{indiciaed5c218eb2843, title = {Atomic Focused Nitrogen Ion Beam from a Liquid-Metal Alloy Ion Source.}, author = {Titze, Michael and Katzenmeyer, Aaron and Flores, Anthony and Wang, Yongqiang and Doyle, Barney and Bielejec, Edward}, year = {2022}, doi = {10.2172/2001927}, url = {https://www.osti.gov/biblio/2001927}, note = {Source identifier: 2001927} }