TY  - RPRT
TI  - Atomic Focused Nitrogen Ion Beam from a Liquid-Metal Alloy Ion Source.
AU  - Titze, Michael
AU  - Katzenmeyer, Aaron
AU  - Flores, Anthony
AU  - Wang, Yongqiang
AU  - Doyle, Barney
AU  - Bielejec, Edward
PY  - 2022
DO  - 10.2172/2001927
UR  - https://www.osti.gov/biblio/2001927
ID  - 2001927
ER  -