@misc{indiciae1df8171de823,
  title = {Deterministic creation of optically active defect in AlN toward integrated single photon emitters.},
  author = {Byeon, Heejun and Titze, Michael and Campbell, DeAnna and Schultz, Peter and Wang, George and Bielejec, Edward and Lilly, Michael and Mounce, Andrew},
  year = {2022},
  doi = {10.2172/2002010},
  url = {https://www.osti.gov/biblio/2002010},
  note = {Source identifier: 2002010}
}