TY  - RPRT
TI  - Deterministic creation of optically active defect in AlN toward integrated single photon emitters.
AU  - Byeon, Heejun
AU  - Titze, Michael
AU  - Campbell, DeAnna
AU  - Schultz, Peter
AU  - Wang, George
AU  - Bielejec, Edward
AU  - Lilly, Michael
AU  - Mounce, Andrew
PY  - 2022
DO  - 10.2172/2002010
UR  - https://www.osti.gov/biblio/2002010
ID  - 2002010
ER  -