@misc{indiciaef5083ea42f09,
  title = {Reconstruction of sparse, nanoscale metrology data for efficient process control.},
  author = {Natinski and Dingreville, Remi and Cullinan},
  year = {2022},
  doi = {10.2172/2002030},
  url = {https://www.osti.gov/biblio/2002030},
  note = {Source identifier: 2002030}
}