TY  - RPRT
TI  - Reconstruction of sparse, nanoscale metrology data for efficient process control.
AU  - Natinski
AU  - Dingreville, Remi
AU  - Cullinan
PY  - 2022
DO  - 10.2172/2002030
UR  - https://www.osti.gov/biblio/2002030
ID  - 2002030
ER  -