@misc{indiciae63e8ea92b540,
  title = {Endpoint Detection for Through Silicon Via Processing.},
  author = {Hirabayashi, Mieko and Jordan, Matthew and Perez, Carlos and Schmitt, Rebecca and McDow, Jessica},
  year = {2022},
  doi = {10.2172/2003778},
  url = {https://www.osti.gov/biblio/2003778},
  note = {Source identifier: 2003778}
}