@misc{indiciae7846e22014be, title = {Interface Trap Density Characterization of ALD Gate Dielectrics for GaN Power MOSFETs.}, author = {Glaser, Caleb and Rummel, Brian and Binder, Andrew and Yates, Luke and Allerman, Andrew and Feezell, Daniel and Kaplar, Robert}, year = {2022}, doi = {10.2172/2003786}, url = {https://www.osti.gov/biblio/2003786}, note = {Source identifier: 2003786} }